High-frequency micromechanical columnar resonators
نویسندگان
چکیده
منابع مشابه
High-frequency micromechanical columnar resonators.
High-frequency silicon columnar microresonators are fabricated using a simple but effective technological scheme. An optimized fabrication scheme was invented to obtain mechanically protected microcolumns with lateral dimensions controlled on a scale of at least 1 μm. In this paper, we investigate the influence of the environmental conditions on the mechanical resonator properties. At ambient c...
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ژورنال
عنوان ژورنال: Science and Technology of Advanced Materials
سال: 2009
ISSN: 1468-6996,1878-5514
DOI: 10.1088/1468-6996/10/3/034601